New TrueMetrix™ Scan Linearizer Makes Accuracy and Precision in Scanning Probe Microscopes State-of-the-Art.

[True Metrix] Click for full views

Zooming and Panning with a TrueMetrix™ closed-loop scanner. Note that a large area can be scanned and then zoomed anywhere within the image with high accuracy and with no distortion in x, y or z. It also eliminates the major barrier to obtaining truly accurate three-dimensional measurements with scanning probe microscopes (SPMs).

[TrueMetrix] Device Image Scanned Using TrueMetrix™

Before TrueMetrix™, passive software correction was required in SPMs to minimize the hysteresis and non-linearity inherent in SPM scanners, but the distortions in x, y, and z could not be completely eliminated to the extent required by the metrology-intensive semiconductor industry and the magnetic media, material science, biotechnology, and other industries. TrueMetrix™ produces the most accurate and reproducible measurements of any commercial SPM by adapting to each sample in real time.

[TrueMetrix] VLSI Standard Scanned Using TrueMetrix™

All open-loop piezo ceramic SPM scanners suffer from hysteresis and non-linearity. Software correction, no matter how elegant, can only go so far in correcting the resulting image distortions and measurement errors due to its inability to adapt to the topography of each individual sample. TrueMetrix™, however, provides a closed-loop measurement of the piezo scanner's movement based on an inherently linear sensor-improving scan linearity and reducing hysteresis in all three scan dimensions (x, y, z) even after changing scan size and direction. With TrueMetrix™, the SPM user can make three-dimensional nanoscale measurements of samples that are accurate and reproducible-surpassing the best results possible with software correction schemes.

[TrueMetrix] CD Stamper scanned with TrueMetrix™

TrueMetrix™ designs and manufactures scanning probe microscopes for worldwide distribution. Scanning probe microscopes are used by industry, government, university, and research laboratories to characterize materials by providing extremely high-resolution three-dimensional images of surfaces. This rapidly growing technology builds upon the Nobel Prize-winning invention in 1981 of the scanning tunneling microscope and its ability to image individual atoms.

TopoMetrix Corporation: 5403 Betsy Ross Drive, Santa Clara, CA 95054
- U.S. tel. - (408) 982-9700 - FAX - (408) 982-9751
Web-Master: Gary Williams garyw@topometrix.com

Home Page - http://www.topometrix.com

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